Polished polymide substrate
US6563998B1 · kind B1 · utility
89Cited by
9References
54Claims
0Family size
Inventors
Key dates
| Filing date | Apr 15, 1999 |
| Grant date | May 13, 2003 |
| Priority date | — |
| Expiry date | Apr 15, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.