Angular speed sensor
US6564639B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2001 |
| Grant date | May 20, 2003 |
| Priority date | — |
| Expiry date | Dec 18, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention aims at improving detection sensitivity of an angular rate sensor that uses a tuning fork vibrator composed of mono-quartz piezoelectric material such as crystallized quartz. To achieve this purpose, the present invention includes a tuning fork vibrator (10) having two tuning fork prongs (10a) and (10b), and a tuning fork base (10c), comprised of two vibrators (20) and (30) directly bonded into one piece in an orientation of their thickness in a manner that they are oriented in a direction of crystallographic axis that produces piezoelectric phenomenon of reversed polarity with respect to each other in a lateral direction. There are electrodes (5), (6), (7) and (8) for detection, disposed to interior-side surfaces and exterior-side surfaces of both of the tuning fork prongs (10a) and (10b), and electrodes (1) and (2) for driving, disposed to both of the tuning fork prongs (10a) and (10b) in a such relation to the electrodes (5), (6), (7) and (8) for detection as to cancel capacitive couplings from the driving side to the detection side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.