Stable differential pressure measuring system
US6564642B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 2, 2000 |
| Grant date | May 20, 2003 |
| Priority date | — |
| Expiry date | Nov 2, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/143
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a stable differential pressure measurement system. Two micro-machined semiconductive capacitive sensors each has a diaphragm exposed on one side and having a sealed partially evacuated chamber within the sensor on the other side of the diaphragm. A circuit corrects the slope responses and offsets of the capacitive sensor output signals to provide an accurate differential pressure measurement. Sensitive electronics are buried within the sensors and isolated within the sealed housing to protect them from harsh surrounding media. Such harsh surrounding media can be found when the system is used in an automobile exhaust system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.