Infrared sensing element and temperature measuring device
US6565254B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2001 |
| Grant date | May 20, 2003 |
| Priority date | — |
| Expiry date | Jun 6, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared sensing element of the present invention includes a base including a thin film portion and a thick wall portion arranged around the thin film portion, and a thermopile including a plurality of thermocouples connected in series so that cold junctions are located on the thick wall portion and hot junctions are located on the thin film portion, wherein a thermosensitive portion is provided in contact with the thick wall portion so that a reference temperature with high accuracy can be used for determining temperature based on output from the thermopile. A PN junction formed on a semiconductor substrate serves as the thermosensitive portion, and it is used to provide for a compact infrared sensing element with high performance at low cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.