Method and apparatus for local vectorial particle cleaning
US6566169B1 · kind B1 · utility
13Cited by
15References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2001 |
| Grant date | May 20, 2003 |
| Priority date | — |
| Expiry date | Oct 16, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.