Liquid crystal display device having conductive lines formed with amorphous oxide conductive layer on metal layer and method of fabrication thereof
US6567145B1 · kind B1 · utility
31Cited by
16References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2000 |
| Grant date | May 20, 2003 |
| Priority date | — |
| Expiry date | Mar 27, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1362
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a liquid crystal display device which can simplify patterning steps of signal wirings and electrodes during manufacture and can enhance the reliability by preventing the electrolytic corrosion of terminal portions or the like. At the time of forming electrodes and/or signal wirings on a substrate 1, an amorphous oxide conductive film 3 having a large etching rate is laminated onto a metal film 2 which is made of chromium or the like and is formed on the substrate 1, and these films arc etched simultaneously in only one photolithography treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.