Electrical power supply suitable in particular for DC plasma processing
US6567278B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2002 |
| Grant date | May 20, 2003 |
| Priority date | — |
| Expiry date | Jun 27, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02M3/33573
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A power supply comprising a DC-DC converter which comprises(a) a first transformer (11);(b) a second transformer (12);(c) a first H-bridge switching circuit (13) for selectively connecting a primary DC source (14) to the primary winding of said first transformer;(d) a second H-bridge (15) switching circuit for selectively connecting said primary DC source (14) to the primary winding of said second transformer (12);(e) a bridge rectifier circuit (16) connected to the secondary windings of said first and second transformers; and(f) a control circuit (17) for providing sets of control pulses for effecting switching of switching elements of the first and the second H-bridge switching circuits (13, 15).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.