Capacitive differential pressure sensor

US6568275B2 · kind B2 · utility

Assignee

• ABB PATENT GMBH · DE

Inventors

• Wolfgang Scholz · Minden, DE
• Albrecht Vogel · Oberkochen, DE
• Peter Krippner · Karlsruhe, DE
• Dieter Binz · Hirschberg, DE

Key dates

• Filing date: Jun 14, 2002
• Grant date: May 27, 2003
• Expiry date: Jun 14, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0073
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

There is described a capacitive differential pressure sensor made using glass-silicon technology with a diaphragm plate of silicon, which is arranged between two carrier plates consisting of glass. The diaphragm plate has pressure-sensitively deflectable regions, which are respectively provided with a capacitor arrangement. The capacitor arrangement is connected to a measured-value processing device through connecting conductors. To improve the ratio of the measuring capacitances to the parasitic capacitances brought about by the connecting conductors, the diaphragm plate is outside the pressure-sensitively deflectable region the substrate of an electronic circuit which comprises at least one input stage of the measured-value processing device.