Device for gas sensing

US6569779B1 · kind B1 · utility

Assignee

• Nordic Sensor Technologies AB · SE

Inventors

• Ingemar Lundstrom · Linköping, SE
• Per Mårtensson · Nacka, SE

Key dates

• Filing date: Jan 8, 2001
• Grant date: May 27, 2003
• Expiry date: Jan 8, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/414
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In order to obtain long time stability and usefulness for gas sensitive field-effect devices a micro structured surface is obtained below the final conducting layer. The conductive layer in the trenches or grooves will not only be protected to some extent but also they can constitute a conductive net with edges or boundaries that will remain essentially unchanged even if material is continuously lost along the borderline. The structure can be obtained in the layer laying directly below the conductive layer or in deeper lying layers with intermediate layers with even thickness.