Patent · US Expired

Calibration method and device for visual measuring systems

US6570663B1 · kind B1 · utility

1Cited by
13References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 7, 2000
Grant dateMay 27, 2003
Priority date
Expiry dateApr 18, 2021

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B15/26
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A calibration method and a calibration device for two-point cold calibration are suitable for calibration of any visual measuring system having a width analyzer. In particular, the method and the calibration device are used to calibrate a CCD camera in a visual measuring system used to monitor the diameter of a crystal rod being grown by a crystal growing apparatus using the well-known Czochralski process. The calibration method takes into account non-linear error and avoids the need to actually grow crystals for calibration. The calibration device is specifically designed for quick and accurate set-up.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.