Calibration method and device for visual measuring systems
US6570663B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2000 |
| Grant date | May 27, 2003 |
| Priority date | — |
| Expiry date | Apr 18, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B15/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A calibration method and a calibration device for two-point cold calibration are suitable for calibration of any visual measuring system having a width analyzer. In particular, the method and the calibration device are used to calibrate a CCD camera in a visual measuring system used to monitor the diameter of a crystal rod being grown by a crystal growing apparatus using the well-known Czochralski process. The calibration method takes into account non-linear error and avoids the need to actually grow crystals for calibration. The calibration device is specifically designed for quick and accurate set-up.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.