Method for determining and implementing electrical damping coefficients
US6571029B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2001 |
| Grant date | May 27, 2003 |
| Priority date | — |
| Expiry date | Oct 3, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In one implementation, a method for operating a plurality of MEMS devices including applying a magnitude of a selected actuation signal equal to a first substantially constant magnitude to an actuator to cause a movable structure to begin to accelerate from a first position to impact a motion stop at a second position. The method also includes decreasing the magnitude of the selected actuation signal in a first manner. The method further includes varying at least one of a start time and a duration of the decreasing magnitude of the selected actuation signal and observing a settling time of the movable structure in response to the step of varying. In some implementations, the method includes ascertaining a range of values for the start times and the corresponding durations for each of the plurality of MEMS devices that are capable of providing settling times of the movable structure in conformance with a predetermined specification based on the steps of varying and observing. Such an implementation can include using the ascertained range of values for each device and the selected actuation signal for determining an operating start time and a corresponding operating duration to const…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.