Imaging using spatial frequency filtering and masking
US6571183B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2000 |
| Grant date | May 27, 2003 |
| Priority date | — |
| Expiry date | Oct 18, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of, an and apparatus for, creating an image of currents flowing through current paths in a microelectronic circuit such that the image of the currents has improved spatial resolution using filters. The filters increase the spatial resolution and eliminate noise and edge artifacts in magnetic field and electric field images of electronic circuits. In accordance with the method, a magnetic field image is created with a scanning SQUID microscope. A magnetic inversion technique is then used to convert the magnetic field image into a current density image. The current density image is filtered based upon known restrictions on the wiring geometry of the microelectronic circuit being imaged. The technique can also be applied to convert electric fields of a circuit from a scanning single electron transistor microscope into images of the voltage levels on the wires in the circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.