Dynamically balanced microelectromechanical devices
US6571630B1 · kind B1 · utility
45Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2002 |
| Grant date | Jun 3, 2003 |
| Priority date | — |
| Expiry date | Jul 9, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Dynamic balancing reduces quadrature bias in microfabricated vibrating instruments such as tuning fork gyros so that a purity of motion is achieved in the absence of any angular rate input. Balancing is achieved by ablating (74) or depositing (72) onto support structure (62) for a tuning fork gyroscope rather than the proof mass (60) itself by melting and moving material on a tuning fork beam (62). Such adjusting is advantageously done during actual operation of the gyro by laser beam application through an encapsulating transparent cover which can be either part of the chip die or an external package.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.