Apparatus for depositing a thin film on a data recording disk
US6571729B2 · kind B2 · utility
15Cited by
11References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2001 |
| Grant date | Jun 3, 2003 |
| Priority date | — |
| Expiry date | Nov 1, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S428/90
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for depositing a protective film on a data recording disk, including the steps of depositing a magnetic film layer as a data recording layer on a surface of a substrate while the substrate is at a magnetic film deposition temperature; heating the substrate with the magnetic film layer thereon to a protective film deposition temperature; and depositing a protective film on the magnetic film layer while the substrate is at the protective film deposition layer; wherein the protective film deposition temperature is higher than the magnetic film deposition temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.