Gas preheater and process for controlling distribution of preheated reactive gas in a CVI furnace for densification of porous annular substrates
US6572371B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2002 |
| Grant date | Jun 3, 2003 |
| Priority date | — |
| Expiry date | May 6, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/045
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gas preheater for a CVI furnace designed for the densification of annular porous substrates arranged in a plurality of vertical annular stacks of substrates, comprising: a sleeve made of heat conductive material resting upon the bottom wall of a susceptor and delimiting a gas preheating chamber, with a gas inlet opening in the gas preheating chamber; a heat exchange assembly located in the gas preheating chamber; a gas distribution plate resting upon the sleeve, covering the gas preheating chamber and provided with a plurality of passages for preheated gas; a load supporting plate for supporting stacks of annular substrates and provided with a plurality of passages in communication with respective passages of the gas distribution plate and registration with internal volumes of respective stacks of annular substrates; and nozzles inserted in passages communicating the gas preheating zone with the internal volumes of respective stacks of annular substrates for adjusting the flows of preheated gas respectively admitted in said internal volumes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.