Clean room device
US6572468B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2002 |
| Grant date | Jun 3, 2003 |
| Priority date | — |
| Expiry date | Mar 20, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F3/167
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
In a ceiling (12) of a room (10) of a clean room device (15), fan filter units (14) are arranged at distances, and to an open grid space where no fan filter unit (14) is provided, a breathable body (40) is provided. When clean air is sent from an over-ceiling space (16) into the room (10) by the fan filter unit (14), an air pressure in the room (10) becomes higher than that in the over-ceiling space (16), and part of the air in the room (10) flows to the over-ceiling space (16) through the breathable body (40). Consequently, it is possible to prevent an occurrence of a swirling current in an area under an open grid space in the room (10), and cleanliness in the room (10) can be raised.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.