Integrated multilayered microfludic devices and methods for making the same
US6572830B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 1999 |
| Grant date | Jun 3, 2003 |
| Priority date | — |
| Expiry date | Jun 21, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/4629
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multilayered microfluidic device having a substantially monolithic structure is formed by sintering together a plurality of green-sheet layers. The substantially monolithic structure has an inlet port for receiving fluid, an outlet port for releasing fluid, and an interconnection between the inlet port and the outlet port. The substantially monolithic structure may also include a variety of components to enable useful interaction with the fluid, such as electrically conductive pathways, heaters, fluid sensors, fluid motion transducers, and optically transmissive portions. The components are preferably fabricated using thick-film or green-sheet technology and are preferably co-fired with and sintered to the green-sheet layers to become integral with the substantially monolithic structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.