Patent · US Expired

Integrated multilayered microfludic devices and methods for making the same

US6572830B1 · kind B1 · utility

236Cited by
80References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 21, 1999
Grant dateJun 3, 2003
Priority date
Expiry dateJun 21, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K3/4629
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A multilayered microfluidic device having a substantially monolithic structure is formed by sintering together a plurality of green-sheet layers. The substantially monolithic structure has an inlet port for receiving fluid, an outlet port for releasing fluid, and an interconnection between the inlet port and the outlet port. The substantially monolithic structure may also include a variety of components to enable useful interaction with the fluid, such as electrically conductive pathways, heaters, fluid sensors, fluid motion transducers, and optically transmissive portions. The components are preferably fabricated using thick-film or green-sheet technology and are preferably co-fired with and sintered to the green-sheet layers to become integral with the substantially monolithic structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.