Sensor for non-contacting electrostatic detector
US6573725B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2001 |
| Grant date | Jun 3, 2003 |
| Priority date | — |
| Expiry date | Aug 24, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R29/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. The driver transducer is at a location along the beam and is operated at a vibratory frequency such that a virtual mechanical node appears along the beam. This, in turn, reduces vibration at the mechanical attachment node so that the degree of stiffness of the mechanical node does not affect the operating frequency and/or the displacement at the free end of the cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.