Opposing electrode light modulator array and method for manufacturing the same

US6574028B2 · kind B2 · utility

Assignees

• Creo Il. Ltd. · IL
• The Regents of the University of California · US

Inventors

• Sadik C. Esener · Solana Beach, US
• Yossi Ronen · Herzliya, IL

Key dates

• Filing date: Dec 28, 2001
• Grant date: Jun 3, 2003
• Expiry date: Dec 28, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F1/0316
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An improved linear light modulator array is formed with opposing electrodes which extend away from the optic surfaces of optoelectronic material used to form the array. A uniform electric field is created across a modulator volume, generally perpendicular to light propagation within the modulator volume. The modulator volume of an element in the array is a function of electrode length, width and separation. Additional elements are defined by additional pairs of electrodes. Trenches in the electrooptical material separate adjacent electrodes of separate modulator elements. A preferred depth of trench penetrates the electrooptical material about 10-15% of the distance between opposing electrodes. The geometry is obtained by cutting optoelectronic material into strips. Cut sides of the strips are metallized, one at a time, with the opposite side temporarily affixed to a carrier. Aligned trenches are cut into the metallized strips and electrooptical material to separate electrode pairs, reduce crosstalk and define array elements.