Magnetic thin film media with a protective layer of CNx having a plurality of compositions
US6576328B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2001 |
| Grant date | Jun 10, 2003 |
| Priority date | — |
| Expiry date | Oct 14, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A thin film structure comprising a protective layer structure having at least two different compositions of carbon and nitrogen with the surface of the protective layer having the lowest nitrogen content is disclosed. The protective layer structure of the invention is preferably used over the magnetic material in a thin film magnetic disk. In the protective layer structure of the invention, the durability of a relatively high nitrogen content CNx material is improved by the addition of a surface sublayer of CNx with a relatively low nitrogen concentration. The resulting protective layer structure provides superior durability to either of the thin film compositions used alone achieving a synergistic result. The protective layer structure of the invention has the additional benefit of decreasing the polar surface energy and therefore, improving the corrosion resistance of the film structure. In one embodiment the protective layer of the invention is implemented as two discrete sublayers with the surface sublayer having the lowest nitrogen concentration. In this embodiment the surface sublayer has from 0 to 8 at. % nitrogen and the higher nitrogen content is between 10 and 25 at. % ni…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.