Sample holder, sample mount and sample mount jig for use in electron microscope
US6576910B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2001 |
| Grant date | Jun 10, 2003 |
| Priority date | — |
| Expiry date | May 30, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20207
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An object is to provide a sample holder and a sample mount which allow observation of a sample from many directions in an electron microscope. A sample holder (10) is made for use in a transmission electron microscope (TEM). In the TEM, an electron beam is incident in the Z direction. A sample mount (17) and a sample (SA) affixed on it can be rotated by a motor (12) in the range of 0 to 360° on an axis extending in the Y direction which differs from the direction of the electron beam incidence. Therefore the electron beam can enter the observed sample (SA) from many directions, thus allowing observation of the sample (SA) from many directions. It is also possible to FIB-process the sample (SA) in many directions without removing the sample (SA) from the sample holder (10), which facilitates the handling in the FIB processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.