Capacitive ceramic relative-pressure sensor
US6578427B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 12, 2000 |
| Grant date | Jun 17, 2003 |
| Priority date | — |
| Expiry date | Jun 12, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This relative-pressure sensors has virtually no zero offset at relative humidities up to near the saturation limit. The sensor has a diaphragm (11) having a surface on which a electrode (13) is deposited and a substrate (12) having a bore (23) for guiding reference air from af first surface to an opposite surface. The first surface is polished and provided with at least an addional electrode (15). The substrate and the diaphragm are soldered or brazed together along the periphery by means of a spacer (20) to form a chamber which is covered from inside with a thin layer (24) of hydrophobic material that is introduced through the bore after the soldering or brazing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.