Chemically inert flow control with non-contaminating body
US6578435B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 23, 1999 |
| Grant date | Jun 17, 2003 |
| Priority date | — |
| Expiry date | Nov 23, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/776
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fluid control module that may be connected in-line within a chemically corrosive or ultra pure fluid flow circuit that delivers fluids in either a liquid or gaseous state. The fluid control module of the present invention may be utilized to control the flow, pressure or volume of fluid flowing through the fluid flow circuit and is capable of automatically adjusting or “calibrating” the module to compensate for changes in atmospheric pressure or drift in the pressure sensors of the fluid control module. The fluid control module also includes a rapid or macro adjustment of the control valve to reach the desired flow rate at a quicker pace.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.