Modular device of tubular plasma source
US6578514B2 · kind B2 · utility
0Cited by
3References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 31, 2001 |
| Grant date | Jun 17, 2003 |
| Priority date | — |
| Expiry date | Aug 11, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/321
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A modular device of tubular plasma source mainly includes at least two tubular antennae, one RF power supply and one reference potential. The tubular antennae are arranged side by side for inducing plasma. Each tubular antenna includes an induction coil being a spiral spring shape, and a dielectric sleeve having a hollow through hole for putting in the induction coil. The RF power supply connects with the induction coil in parallel or in series, the reference potential refers to the RF power supply and connects with the induction coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.