Functional film having optical and electrical properties
US6579624B2 · kind B2 · utility
2Cited by
8References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 28, 2001 |
| Grant date | Jun 17, 2003 |
| Priority date | — |
| Expiry date | Nov 28, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A functional film includes a transition layer having a first constituent having SiO as a dielectric material and at least one second constituent selected from aluminum (Al), silver (Ag), silicon (Si), germanium (Ge), yttrium (Y), zinc (Zn), zirconium (Zr), tungsten (W) and tantalum (Ta). The first and second constituents have corresponding gradual content gradients according to a thickness of the functional film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.