Method of manufacturing a window transparent to electron rays, and window transparent to electron rays

US6580781B2 · kind B2 · utility

Assignee

• KONINKLIJKE PHILIPS ELECTRONICS NV · NL

Inventors

• Peter Klaus Bachmann · Würselen, DE
• Manfred Beckmann · Aachen, DE
• Peter Flisikowski · Hamburg, DE
• Geoffrey Harding · Hamburg, DE

Key dates

• Filing date: Oct 9, 2001
• Grant date: Jun 17, 2003
• Expiry date: Oct 9, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2235/168
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A window transparent to electron rays is provided which includes a foil which is transparent to electron rays and an element for supporting a peripheral region of the foil in an operational state. The element is made from a material having a greater linear thermal expansion coefficient than the foil material. The window transparent includes an intermediate layer between the foil and a retaining element. The retaining element acts as a support element and consists of a material having a linear thermal expansion coefficient which is equal or similar to the linear thermal expansion coefficient of the foil material and smaller than the linear thermal expansion coefficient of the material of the retaining element over a processing temperature range. A method of manufacturing a window which is transparent to electrons and an X-ray device with a window transparent to electrons are also provided.