Patent · US Expired

Active temperature gradient reducer

US6581388B2 · kind B2 · utility

46Cited by
18References
36Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 27, 2001
Grant dateJun 24, 2003
Priority date
Expiry dateNov 27, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldThermal processes and apparatus
  • WIPO sectorMechanical engineering

Abstract

An apparatus and method for actively reducing the temperature gradient of a substrate. The substrate is placed in thermal contact with a heat dissipation structure so as to dissipate heat from the substrate. Current is passed through a thermoelectric device, so as to provide cooling to at least one hot spot on the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.