Method of manufacturing a microstructure
US6583920B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 29, 2001 |
| Grant date | Jun 24, 2003 |
| Priority date | — |
| Expiry date | Nov 29, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0108
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of manufacturing a micromirror actuator includes forming a trench on a substrate by etching, laminating a film-type organic layer on the substrate to cover but not fill the trench so that the trench is maintained hollow, and depositing and patterning a metal layer on the film-type organic layer and removing the film-type organic layer. According to the method of manufacturing a micromirror actuator, a micromirror can be easily planarized by laminating the film-type organic layer on the substrate including the trench, which reduces the cost of manufacturing the micromirror actuator and increases a reflectivity of the micromirror actuator by increasing the flatness level of the micromirror so as to enhance an optical transmission efficiency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.