Patent · US Expired

Tunable Fabry-Perot filter and tunable vertical cavity surface emitting laser

US6584126B2 · kind B2 · utility

27Cited by
19References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 28, 2000
Grant dateJun 24, 2003
Priority date
Expiry dateDec 28, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/3201
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A tunable Fabry-Perot filter and a tunable vertical cavity surface emitting laser (VCSEL) are disclosed, where both devices utilize an improved dome structure for creating an internal air gap.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.