Patent · US Expired

Electro optic modulator

US6584239B1 · kind B1 · utility

26Cited by
9References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 5, 2000
Grant dateJun 24, 2003
Priority date
Expiry dateSep 5, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F1/025
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A doped slab region is described for use around a ridge waveguide, for controlling the refractive index of the waveguide material. Instead of simply diffusing dopant in from a surface of the slab region adjacent the waveguide, an area of the slab region is etched and dopant diffused in from a side face of the etched region. Thus, the dopant profile is established from a horizontal direction, allowing the profile to be controlled. A simple vertically uniform doping profile can thus be provided, leading to a vertically uniform current density, or an anisotropic wet etch can be applied after the initial etch to provide a profile which concentrates the current density at a selected height in the slab region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.