Patent · US Expired

Method for operating a film leak detector and film leak detector suitable for carrying out this method

US6584829B1 · kind B1 · utility

2Cited by

10References

18Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Rudolf Flosbach · Wipperfürth, DE
Rudi Widt · Recklinghausen, DE

Key dates

Filing date	Apr 9, 2001
Grant date	Jul 1, 2003
Priority date	—
Expiry date	Apr 9, 2021

Classification

Technology area (CPC G)Physics
CPC primaryG01M3/227
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for operating a film leak detector (1) which includes two films (5, 6) each stretched in a frame (3, 4), which, with a test sample (79) emplaced, delimit a test chamber (80). The detector is equipped with two vacuum pumps (13, 30), in which first the test chamber (80) is evacuated and, after the evacuation operation, a leak detection operation takes place. In order to avoid test gas pollution and impurities during the first phase of the evacuation of the test chamber (80), only one (13) of the two vacuum pumps is operated and during the leak detection operation only the second vacuum pump (30) is operated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.