High performance substrate scanning
US6586750B2 · kind B2 · utility
25Cited by
14References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2001 |
| Grant date | Jul 1, 2003 |
| Priority date | — |
| Expiry date | Aug 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/6456
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical scanning system for examining material associated with a substrate includes at least one scanning module for displacing two or more objective lenses, at least one optical coupling system and a translation system. The two objective lenses are mounted on one or more scan arms and are constructed to scan over regions or subregions associated with the substrate. The scanning module is configured to displace the scan arm(s) to perform the scan and thereby displace the two objective lenses. Each objective lens is arranged to deliver light to the material and collect light from the material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.