Patent · US Expired

Transistor insulator layer incorporating superfine ceramic particles

US6586791B1 · kind B1 · utility

39Cited by
11References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 19, 2000
Grant dateJul 1, 2003
Priority date
Expiry dateMar 13, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K85/615
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An insulating layer in a field effect transistor is formed of superfine ceramic particles dispersed in a polymeric matrix. The characteristics of the insulating layer can be changed by varying the mix of ceramic particles and matrix components. Appropriate selection of components can provide a high dielectric constant material which is not subject to pinholes, has a high voltage breakdown and is chemically resistant. The material can be applied at relatively low processing temperatures, using a wide range of coating techniques, and is highly suited for use with polymeric substrates.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.