Sealed, nozzle-mix burners for silica deposition
US6588230B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 1999 |
| Grant date | Jul 8, 2003 |
| Priority date | — |
| Expiry date | Jul 30, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF23L2900/07002
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
Burners (40) for producing fused silica boules are provided. The burners employ a tube-in-tube (301-306) design with flats (56, 50) on some of the tubes (305, 301) being used to limit the cross-sectional area of certain passages (206, 202) within the burner and/or to atomize a silicon-containing, liquid source material, such as OMCTS. To avoid the possibility of flashback, the burner has separate passages for fuel (205) and oxygen (204, 206), i.e., the burner employs nozzle mixing, rather than premixing, of the fuel and oxygen. The burners are installed in burner holes (26) formed in the crown (20) of a furnace and form a seal with those holes so that ambient air cannot be entrained into the furnace through the holes. An external air cooled jacket (60) can be used to hold the temperature of the burner below a prescribed upper limit, e.g., 400° C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.