Process for preparing a target for use in the production of a thin metal oxide film
US6589453B1 · kind B1 · utility
4Cited by
13References
11Claims
0Family size
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Key dates
| Filing date | Dec 13, 2000 |
| Grant date | Jul 8, 2003 |
| Priority date | — |
| Expiry date | Dec 13, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/32
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process for preparing a target for use in production of a thin metal oxide film that comprises molding an amorphous powder of organic metal chelate complexes to obtain the target. The process also includes mixing metallic materials with an organic chelating agent so as to give a predetermined metal composition to prepare a transparent aqueous solution of organic metal chelate complexes. The process also includes spray-drying the aqueous solution to obtain an amorphous powder of the organic metal chelate complexes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.