Microelectronic fabrication electrical test apparatus and method providing enhanced electrical test accuracy
US6590408B1 · kind B1 · utility
7Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 2002 |
| Grant date | Jul 8, 2003 |
| Priority date | — |
| Expiry date | May 29, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Within both an electrical test apparatus for electrically testing a substrate, and a method for electrically testing the substrate while employing the electrical test apparatus, there is provided for an automatic selection of an electrical test program, absent operator intervention, once having identified a substrate. Due to the absence of operator intervention, the substrate is more accurately electrically tested.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.