Imaging optical system for direct phase-angle measurement of radiation
US6590668B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 7, 1999 |
| Grant date | Jul 8, 2003 |
| Priority date | — |
| Expiry date | Dec 7, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/0215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method serves the direct phase-angle measurement of radiation, in particular of light radiation which is reflected from a body. The body is exposed to coherent radiation. The radiation reflected from the body is imaged by an imaging optical system (6) in an image plane in which a sensor is located. A reference radiation generated in accordance with the shearing method is superimposed on the sensor. The phase of the radiation from the body is determined from the measurement signals of the sensor. To improve such a method, the imaging optical system (6) possesses a diaphragm (11) having one or two apertures (12, 13) (FIG. 2a).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.