Patent · US Expired

Imaging optical system for direct phase-angle measurement of radiation

US6590668B1 · kind B1 · utility

4Cited by
5References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 7, 1999
Grant dateJul 8, 2003
Priority date
Expiry dateDec 7, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J9/0215
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method serves the direct phase-angle measurement of radiation, in particular of light radiation which is reflected from a body. The body is exposed to coherent radiation. The radiation reflected from the body is imaged by an imaging optical system (6) in an image plane in which a sensor is located. A reference radiation generated in accordance with the shearing method is superimposed on the sensor. The phase of the radiation from the body is determined from the measurement signals of the sensor. To improve such a method, the imaging optical system (6) possesses a diaphragm (11) having one or two apertures (12, 13) (FIG. 2a).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.