Correction method for a coordinate measuring apparatus

US6591208B2 · kind B2 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Werner Lotze · Dresden, DE
• Ralf Bernhardt · Aalen, DE

Key dates

• Filing date: May 23, 2001
• Grant date: Jul 8, 2003
• Expiry date: May 23, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/045
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention is directed to a method for correcting the measuring results of a coordinate measuring apparatus wherein a workpiece is continuously scanned. The dynamic bending characteristic of the probe is determined or a multidimensional parameter field especially as a dynamic tensor (D). Corrective values are computed from the parameter field D while considering the acceleration of the probe ({right arrow over (b)}). Then, the measuring results are corrected with corrective values. To improve the accuracy of the method, the parameter field is the product of the static bending tensor (NT) of the probe and the mass tensor (MT+mE) of the probe and/or the parameter field describes the deviations normal to the workpiece surface by accelerating the probe.