Patent · US Expired

Seal-gas valve device

US6591851B1 · kind B1 · utility

11Cited by

7References

15Claims

0Family size

Assignee

LEYBOLD VAKUUM GmbH · DE

Inventors

Thomas Palten · Kerpen, DE
Robert Stolle · Cologne, DE
Dirk Kalisch

Key dates

Filing date	Sep 26, 2001
Grant date	Jul 15, 2003
Priority date	—
Expiry date	Sep 26, 2021

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T137/87539
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

During the pumping of corrosive gases, it is advantageous to admit a seal gas to endangered pumping chambers at a lower flow rate and a higher pressure than the corrosive gases. Inert gas from a supply (3) has its pressure reduced by a pressure reducer (6). An on/off valve (7) controls a flow of the inert gas through a flow restriction (8) which restricts the flow of inert gas to appropriate sealing gas rates at an outlet (4). After pumping the corrosive gas, a control valve (12) in a bypass line (11) causes the inert gas to be supplied to the outlet (4) at a higher flow rate for purging the pump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.