Integrated pneumatic o-ring gasket for mems devices
US6592128B2 · kind B2 · utility
4Cited by
13References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 10, 2001 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | May 10, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B7/0061
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A gasket for sealing interfaces between a micro-machined device and a macroscopic connection to the device. The gasket can include an o-ring, a frame, a tool post and a notch. Alignment of the tool post with a dimple formed in or through a surface of a component adjacent to the gasket facilitates alignment of the gasket. The notch and frame can also facilitate alignment of the gasket.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.