Method for determination of cure and oxidation of spin-on dielectric polymers
US6593155B2 · kind B2 · utility
13Cited by
13References
13Claims
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Key dates
| Filing date | Dec 28, 2000 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | Dec 28, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/106664
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention is a method comprising preparing a sample by coating a thin film of a precursor material, which is free of fluorescent probe molecules onto a substrate and subjecting the precursor material to conditions to attempt to cause cure of the precursor to an organic, aromatic, polymer having a dielectric constant of less than 3.0, exposing the sample to radiation having a wavelength in the range of 200 to 500 nm, detecting a resulting emission of radiation, and comparing the emission to the emission for a known cured, non-oxidized standard for the polymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.