MEMS-based electrically isolated analog-to-digital converter
US6593870B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2001 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | Oct 18, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03M3/438
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An isolated-ADC and a method for providing isolated analog-to-digital conversion are disclosed. The isolated-ADC includes a microelectromechanical system (MEMS), a comparator, and a digital-to-analog converter (DAC). The MEMS includes a beam element supported from a substrate for movement with respect to an axis, first and second actuators and a sensor. The first and second actuators are capable of exerting respective forces upon the beam element causing the beam element to move in response to analog input and feedback signals, respectively. The sensor detects changes in position of the beam element and produces a position signal indicative thereof. The comparator generates a digital signal based upon a comparison of the position signal with a reference value. Based on the digital signal, the DAC generates the feedback signal, and the isolated-ADC produces a digital output signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.