Patent · US Expired

Emission spectrometer having a charge coupled device detector

US6594010B2 · kind B2 · utility

5Cited by
5References
35Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 6, 2001
Grant dateJul 15, 2003
Priority date
Expiry dateJan 9, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J3/443
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An analyzer suitable for performing continuous gas analysis in ultra-high purity applications. The analyzer combines a low-level emission source and a gaseous emission spectrometer having a charge coupled device (CCD) diode array as a detector. The CCD detector replaces one or more photomultipliers and narrow bandpass filters typically used in spectrometers. The analyzer performs various processing operations to evaluate and eliminate the effect of background light level, or dark spectrum.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.