Emission spectrometer having a charge coupled device detector
US6594010B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2001 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | Jan 9, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/443
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An analyzer suitable for performing continuous gas analysis in ultra-high purity applications. The analyzer combines a low-level emission source and a gaseous emission spectrometer having a charge coupled device (CCD) diode array as a detector. The CCD detector replaces one or more photomultipliers and narrow bandpass filters typically used in spectrometers. The analyzer performs various processing operations to evaluate and eliminate the effect of background light level, or dark spectrum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.