Micromachined device with stretchable restoring force member
US6594057B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2000 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | Jun 5, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B11/10563
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micromachined device of micron dimensions comprising a base and a movable member spaced apart from the base. The movable member has first and second end portions and an axis extending between the first and second end portions. First and second torsional members extend along the axis and are connected to the respective first and second end portions for permitting the movable member to rock between first and second positions about the axis relative to the base. The first and second torsional members are secured to the base. At least a portion of the movable member is of a conductive material. First and second spaced-apart electrodes are carried by the base for driving the movable member between the first and second positions. A tether member extends transversely of the axis and is secured to the first torsional member and to the base whereby the tether member regulates the rocking of the movable member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.