Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof
US6594059B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 16, 2001 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | Jul 16, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A tilt mirror Fabry-Perot tunable filter comprises a frame and a first mirror structure. A tether system connects the first mirror structure to this frame. The tether system is designed to enable the tilting of the first mirror structure relative to an optical axis, in addition to translation of the first mirror structure along the optical axis. A second mirror structure is further provided to define an optical cavity in combination with the first mirror structure. At least two drive electrodes are provided for electrostatically tilting and translating the first mirror structure. The resulting MEMS Fabry-Perot tunable filter is capable for hitless tuning. It can be tuned to between bands directly, i.e., without dropping intervening bands.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.