Method and manufacturing a precisely aligned microlens array
US6594084B1 · kind B1 · utility
7Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2001 |
| Grant date | Jul 15, 2003 |
| Priority date | — |
| Expiry date | Jan 7, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/32
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a microlens array requires at least two fiducial marks formed on a surface of a transparent medium opposite the microlens array. Additional optical features formed on the transparent medium adjacent the microlens array enables precise locationing of fiducial marks on an opposing surface when such surface is exposed to a collimated beam of light. The location of fiducial marks using the method of the invention is about 1 micron or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.