Micromechanical component comprising an oscillating body

US6595055B1 · kind B1 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Harald Schenk · Dresden, DE
• Peter Duerr · Tokyo, JP
• Heinz Kueck · Duisburg, DE

Key dates

• Filing date: May 21, 2001
• Grant date: Jul 22, 2003
• Expiry date: May 21, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0841
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical component comprises a frame layer and an oscillating body which, with the aid of a suspension means, is supported in an opening penetrating the frame layer, in such a way that the oscillating body is adapted to be pivoted about an axis of oscillation vertically to the frame layer plane. At least one oscillating-body lateral surface, which extends substantially at right angles to the frame layer plane, is arranged in relation to at least one inner lateral surface of the opening in such a way that a capacitance formed therebetween is varied by an oscillation of the oscillating body in such a way that an oscillation of the oscillating body about the axis of oscillation can be generated by periodically varying a voltage applied between the frame layer and the oscillating body. A supporting substrate for holding the frame layer is provided, said supporting substrate being implemented such that, in comparison with the influence of the voltage applied between the frame layer and the oscillating body, said supporting substrate has a negligible physical influence on the generation of the oscillation of the oscillating body.