Capacitive pressure sensor

US6595064B2 · kind B2 · utility

Assignee

• Endress+Hauser Inc. · DE

Inventors

• Ulfert Drewes · Bad Hersfeld, DE
• Andreas Rossberg · Bad Säckingen, DE
• Frank Hegner · Bad Kötzting, DE
• Elke Schmidt · Bad Säckingen, DE
• Jurgen Breme · Heusweiler, DE
• Thomas Velten · Wehr, DE

Key dates

• Filing date: May 24, 2001
• Grant date: Jul 22, 2003
• Expiry date: May 24, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0073
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A diaphragm 30 and basic body 20 of a pressure sensor 10 are interconnected via a joint F. A groove 26 is provided in the basic body 20 in order to reduce the stress concentration in the region of the joint F.