Formation of optical components on a substrate
US6596185B2 · kind B2 · utility
2Cited by
21References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2001 |
| Grant date | Jul 22, 2003 |
| Priority date | — |
| Expiry date | Jun 25, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/12004
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of separating optical components is disclosed. The method includes obtaining a substrate structure having a plurality of optical components formed on the substrate structure. The method also includes performing a separation etch on a separation region of the substrate structure. The separation region is selected such that separating the substrate structure at the separation region separates at least one of the optical components from the other optical components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.