Patent · US Expired

Organic substrate having optical layers deposited by magnetron sputtering and method for preparing it

US6596368B1 · kind B1 · utility

26Cited by
5References
64Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 30, 2001
Grant dateJul 22, 2003
Priority date
Expiry dateJan 30, 2021

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31507
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An organic substrate having optically-active layers deposited by magnetron sputtering and a preparation process for it are provided. Gas pressure used for carrying out better adhesion by sputtering is high, comprised between 0.8 and 5.0 Pa. Sputtering is particularly suitable for targets of Si, Ti, Zr and organic substrates with or without anti-abrasive coating. Improved adhesion of thin films is obtained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.